EvilmonkeyzDesignz | Inside a #MEMS Vibrating Structure Gyroscope @EvilmonkeyzDesignz | Uploaded April 2024 | Updated October 2024, 5 hours ago.
#ComponentsCloseUp No. 207: MEMS Angular Rate Sensor
-
*** Quick Facts! ***
Manufacturer: Silicon Sensing Systems
Part Number: CRS03-01T
-
An Angular Rate Sensor, also known as a Gyroscope, is a type of sensor that measures a body’s orientation and angular velocity. This particular sensor uses a MEMS element to do the sensing. The MEMS sensor in this part is a ring that is sandwiched snugly between two magnets(?). The center ring is connected with floating arms to the rest of the chip across a gap before making their way out of the device to a circuit board that processes the output signals.
-
If this sounds familiar at all, you might remember the CRM100/200 that I looked at in #CCU0101. Both those and this device are part of the Vibrating Structure Gyroscopes (VSG) from Silicon Sensing. The CRM100&200 are the latest generation of the VSG (fifth), while the CRS03 belongs to the third generation, originally launched in 1998.
-
From what I’ve seen in the datasheet, they operate essentially the same. There are a total of 8 transducers that form the MEMS circle structure. There are four pairs of two transducers, and among them are driving and sensing elements. The driving elements oscillate the circle at a known frequency, while the sensing elements sense changes by forces acting on them, mainly due to the Coriolis effect. The datasheet for the CRM100/200 parts does a really great job of explaining how they work and I definitely recommend checking them out.
-
These types of units can be typically found in automotive applications, such as roll-over preventions and airbag systems.
#ComponentsCloseUp No. 207: MEMS Angular Rate Sensor
-
*** Quick Facts! ***
Manufacturer: Silicon Sensing Systems
Part Number: CRS03-01T
-
An Angular Rate Sensor, also known as a Gyroscope, is a type of sensor that measures a body’s orientation and angular velocity. This particular sensor uses a MEMS element to do the sensing. The MEMS sensor in this part is a ring that is sandwiched snugly between two magnets(?). The center ring is connected with floating arms to the rest of the chip across a gap before making their way out of the device to a circuit board that processes the output signals.
-
If this sounds familiar at all, you might remember the CRM100/200 that I looked at in #CCU0101. Both those and this device are part of the Vibrating Structure Gyroscopes (VSG) from Silicon Sensing. The CRM100&200 are the latest generation of the VSG (fifth), while the CRS03 belongs to the third generation, originally launched in 1998.
-
From what I’ve seen in the datasheet, they operate essentially the same. There are a total of 8 transducers that form the MEMS circle structure. There are four pairs of two transducers, and among them are driving and sensing elements. The driving elements oscillate the circle at a known frequency, while the sensing elements sense changes by forces acting on them, mainly due to the Coriolis effect. The datasheet for the CRM100/200 parts does a really great job of explaining how they work and I definitely recommend checking them out.
-
These types of units can be typically found in automotive applications, such as roll-over preventions and airbag systems.
