Uploaded June 2014 | Updated September 2026, 1 day ago
Ellipsometry is a very sensitive optical technique which provides unequaled capabilities for thin film metrology. Ellipsometry exploits phase information and polarization state of light and so can achieve angstrom level resolution. The main advantages of ellipsometry are its non-destructive character, high sensitivity and wide measurement range. The optical parameters like thickness and refractive indices of a thin film can be determined precisely by this technique.
In the ellipsometer model no: HO-ED-P15, an elliptically polarized light is made incident on the test substrate and the reflected light which is linearly polarized is analyzed for polarization changes.
The instrument consists of two concentrically rotating arms around a precisely graduated disc fixed to a heavy base. A laser source is held on one arm and the detector assembly on the other arm. The graduated disc has 1 scale and 0.1 resolution achieved through a vernier. Power supplies for laser source and detector are placed separately. Polarizer, analyzer and quarter waveplate are held in precision rotary stages in the optical path with precise graduations having 0-360 range and 0.1 resolution.
Ellipsometry is a very sensitive optical technique which provides unequaled capabilities for thin film metrology. Ellipsometry exploits phase information and polarization state of light and so can achieve angstrom level resolution. The main advantages of ellipsometry are its non-destructive character, high sensitivity and wide measurement range. The optical parameters like thickness and refractive indices of a thin film can be determined precisely by this technique.
In the ellipsometer model no: HO-ED-P15, an elliptically polarized light is made incident on the test substrate and the reflected light which is linearly polarized is analyzed for polarization changes.
The instrument consists of two concentrically rotating arms around a precisely graduated disc fixed to a heavy base. A laser source is held on one arm and the detector assembly on the other arm. The graduated disc has 1 scale and 0.1 resolution achieved through a vernier. Power supplies for laser source and detector are placed separately. Polarizer, analyzer and quarter waveplate are held in precision rotary stages in the optical path with precise graduations having 0-360 range and 0.1 resolution.
