7. Oxidation and the Si/SiO2 Interface. 2D Effects, Doping Effects, Point Defect @mitocw

MIT OpenCourseWare | 7. Oxidation and the Si/SiO2 Interface. 2D Effects, Doping Effects, Point Defect @mitocw | Uploaded June 2024 | Updated October 2024, 6 hours ago.
MIT 6.774 Physics of Microfabrication: Front End Processing, Fall 2004
Instructor: Judy Hoyt

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