Atomic Layer Deposition of copper - If you like sputtering, you'll love this! @AppliedScience

Applied Science | Atomic Layer Deposition of copper - If you like sputtering, you'll love this! @AppliedScience | Uploaded 3 years ago | Updated 20 hours ago
An explanation and demo of atomic layer deposition (ALD) of copper metal on glass. Precursors are copper(I) chloride and hydrogen, processed in a hot-wall tube quartz tube furnace.

10 torr operating pressure
500 sccm argon sweep/purge gas constantly flowing
75 sccm CuCl argon pulse gas (17 seconds including flow controller lag)
100 sccm H pulse gas (14 seconds including flow controller lag)
7 second purge time between pulses
100mm quartz tube furnace diameter
415*C deposition temperature
350*C CuCl evaporation temperature
Substrates are mostly borosilicate glass cleaned with RCA clean
The "good" samples shown in the video are about 750 cycles (about 9 hours

Main ref:
https://sci-hub.se/https://doi.org/10.1002/cvde.19970030107
Also helpful:
https://sci-hub.se/https://doi.org/10.1063/1.5087759
https://sci-hub.se/10.1149/2.0261501jss
https://sci-hub.se/https://doi.org/10.1016/0022-0248(92)90191-K

Alicat flow controller manuals (hard to find via website navigation):
documents.alicat.com/manuals/DOC-MANUAL-MC.pdf
documents.alicat.com/manuals/old/Gas_Flow_Controller_Manual_rev7.pdf
documents.alicat.com/Alicat-Serial-Primer.pdf

RCA clean: en.wikipedia.org/wiki/RCA_clean

CuCl synthesis: http://wwwchem.uwimona.edu.jm/lab_manuals/c1901exp35.html

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$Etching silicon wafers to make colorful Rugate optical filters (porous silicon) Passing an electrical current through a silicon wafer in a special acid etchant will create a porous layer with a variable index of refraction. I describe how this process works, and how the Fourier transform relates filter design to electrical etch waveform and resulting spectral response. Notes: 1. The Rugate filters look especially good in polarized light because the reflection from the silicon wafer is reduced, but the reflection from the filter remains strong. I noticed this while holding the wafer in front of my computer monitor. Later, when showing it to friends, the color intensity was poor. Their monitor must have been horizontally polarized, so holding the wafer low, and tilting it upward didnt work! Some monitors are horizontally polarized, and some are vertical. 2. The magnet used to hold down the PTFE cup to the wafer may have a very slight impact on the etch process. The dramatic shift in filter performance at the periphery is due to O-ring restricting the conductive etchant to a sharp edge, creating an electrical field concentration. Outstanding visual Fourier series tutorial: http://www.jezzamon.com/fourier/index.html LR-1 spectrometer: http://www.aseq-instruments.com/LR1.html p-type wafers on eBay. (You have to hunt around and check the photos for info on the label attached to the box of wafers. Be sure to get wafers less than 0.01 ohm-cm) eg https://www.ebay.com/itm/25-silicon-wafer-P-type-150mm-100-sumco/263441166009 n-type wafers are photosensitive during the etch process. Online graphing calculator page from this video: https://www.desmos.com/calculator/hiju8zdqfz Original Desmos page that I used: https://www.desmos.com/calculator/qpnz9celzf Code for Keithley 2450 control and processing.org waveform generation: https://github.com/benkrasnow/Porous_Silicon_Optics Fourier transform to understand optical coatings: http://www.willeyoptical.com/pdfs/92_180.pdf Porous silicon refs: https://www.rp-photonics.com/rugate_filters.html https://www.intechopen.com/books/porosity-process-technologies-and-applications/porous-silicon https://sci-hub.se/https://doi.org/10.1016/j.mee.2011.03.143 https://sci-hub.se/https://doi.org/10.1080/10408436.2010.495446 https://sci-hub.se/https://doi.org/10.1007/978-3-319-71381-6_2 https://sci-hub.se/https://doi.org/10.1364/AO.44.005415 https://sci-hub.se/10.1364/OE.16.015531 https://sci-hub.se/https://doi.org/10.1002/adma.19940061214 https://sci-hub.se/https://doi.org/10.1063/1.2906337 Silicon wafer identification flats: https://www.tf.uni-kiel.de/matwis/amat/elmat_en/kap_5/illustr/i5_2_4.html Applied Science on Patreon: https://www.patreon.com/AppliedScience$

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